A heavily doped germanium pyramid array for tunable optical antireflection in the broadband mid-infrared range

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چکیده

A highly ordered microscale Ge inverted pyramid array is fabricated by HF-free metal-assisted chemical etching. Doping in the structure significantly modifies reflection behavior mid-infrared region.

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ژورنال

عنوان ژورنال: Journal of Materials Chemistry C

سال: 2022

ISSN: ['2050-7526', '2050-7534']

DOI: https://doi.org/10.1039/d2tc00141a